Surface metrology instrumentation
Surface metrology instrumentation
复制标题
表面计量仪器
DOI：
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发表时间：
1987
期刊：
影响因子：
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通讯作者：
D. Whitehouse
中科院分区：
文献类型：
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作者：
D. Whitehouse
在过去，由于许多问题，有效测量表面所需的仪器的进步受到严重限制。一个是对表面功能的真正理解，另一个是数据处理能力的限制，第三个是由于仪器的限制。在过去的几年里，这三个因素已经在很大程度上通过使用随机过程分析、数字方法以及接触和非接触方法结合在一起。作者探讨了这些独立的主题，并展示了它们在今天和未来如何可能合并。
Progress in the instrumentation required to measure surfaces effectively has, in the past, been severely restricted because of a number of problems. One has been a true understanding of surface function and another has been a limitation in data processing power and a third has been due to instrumental limitations. In the last few years these three factors have been, to a large extent, brought together by using random process analysis, digital methods and both contacting and noncontacting methods. The author explores these separate themes and shows how they are likely to merge today and in the future.