High-speed wavelength switching of tunable MEMS vertical cavity surface emitting laser by ringing suppression
High-speed wavelength switching of tunable MEMS vertical cavity surface emitting laser by ringing suppression
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DOI：
10.7567/jjap.57.040308
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发表时间：
2018-03
影响因子：
1.5
通讯作者：
S. Inoue;S. Nishimura;M. Nakahama;A. Matsutani;T. Sakaguchi;F. Koyama
中科院分区：
文献类型：
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作者：
S. Inoue;S. Nishimura;M. Nakahama;A. Matsutani;T. Sakaguchi;F. Koyama
对于在具有高速波长路由功能的波分复用（WDM）中的使用，可调谐激光器的快速波长切换是关键功能。可调谐MEMS垂直腔面发射激光器（VCSEL）是一个很好的候选光源，用于此目的。MEMS VCSEL中的悬臂梁由于其小的尺寸而具有高的机械谐振频率，但是悬臂梁结构的振铃限制了开关时间。在本文中，我们分析了悬臂梁MEMS反射镜的机械行为，并证明了与工程电压信号的无振铃操作。所施加的电压波形进行了优化，在一个两步的格式，我们实验上获得振铃自由波长开关。我们通过插入可调谐滤波器测量了波长的瞬态响应，其建立时间小于2.5 µs，相当于悬臂梁谐振频率的半个周期。
For use in wavelength division multiplexing (WDM) with high-speed wavelength routing functions, the fast wavelength switching of tunable lasers is a key function. A tunable MEMS vertical cavity surface emitting laser (VCSEL) is a good candidate as a light source for this purpose. The cantilever in MEMS VCSELs has a high mechanical resonance frequency thanks to its small size, but the switching time is limited by the ringing of the cantilever structure. In this paper, we analyzed the mechanical behavior of a cantilever MEMS mirror and demonstrated ringing-free operation with an engineered voltage signal. The applied voltage waveform was optimized in a two-step format and we experimentally obtained ringing free wavelength switching. We measured the transient response of the wavelength by inserting a tunable filter, exhibiting the settling time of less than 2.5 µs, which corresponds to a half period of the cantilever resonance frequency.