A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables
A new, high precision, quick response pressure regulator for active control of pneumatic vibration isolation tables
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DOI：
10.1016/j.precisioneng.2009.01.008
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发表时间：
2010
影响因子：
3.6
通讯作者：
Tomonori Kato;K. Kawashima;T. Funaki;Kotaro Tadano;T. Kagawa
中科院分区：
文献类型：
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作者：
Tomonori Kato;K. Kawashima;T. Funaki;Kotaro Tadano;T. Kagawa
压力调节器是气动系统中的重要元件。减压型精密压力调节器通常用于控制主动控制气动隔振器的供应压力。本文提出了一种高精度、快速响应的气动压力调节器。该系统由恒温室、伺服阀、压力传感器、快速响应层流传感器（QFS）和压差传感器（PD传感器）组成。PD传感器可以检测到腔室中压力的轻微变化，并将其反馈到伺服阀，以将压力保持在期望值。该调节器的性能通过与市售调节器的比较得到了实验证实。将该调节器应用于主动控制气动隔振平台的供气压力调节。实验结果表明，该调节器具有良好的上级性能，特别是在避免上游或下游扰动的影响方面。
Pressure regulators are important elements in pneumatic systems. Relief-type precision pressure regulators are commonly used to control the supply pressure to actively controlled pneumatic vibration isolators. Herein, a high precision, quick response pneumatic pressure regulator is proposed. This consists of an isothermal chamber, a servo valve, a pressure sensor, a quick response laminar flow sensor (QFS), and a pressure differential sensor (PD sensor) as developed by the authors. Slight changes of pressure in the chamber can be detected by the PD sensor and are fed back to the servo valve to maintain the pressure at a desired value. The performance of this regulator was confirmed experimentally in comparison with one available commercially. The regulator was then applied to the supply pressure regulation of an actively controlled pneumatic vibration isolation table. The superior performance of the regulator is clearly shown in the experimental results, especially in terms of avoiding effects from upstream or downstream disturbances.