Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
Global Modeling of N2O Discharges: Rate Coefficients and Comparison with ICP and Glow Discharges Results
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N2O 放电的全局建模：速率系数以及与 ICP 和辉光放电结果的比较
DOI：
10.1155/2013/737463
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发表时间：
2013
影响因子：
1.4
通讯作者：
C. Berenguer
中科院分区：
文献类型：
--
作者：
K. Katsonis;C. Berenguer
我们开发了一个适用于各种功率、气体流速和压力制度的N2O等离子体全局模型。除了与N2O的电子碰撞的能量损失，它考虑到那些由于分子N2和O2和原子N和O物种。正原子N
We developed a Global Model for N2O plasmas valid for applications in various power, gas flow rate, and pressure regimes. Besides energy losses from electron collisions with N2O, it takes into consideration those due to molecular N2 and O2 and to atomic N and O species. Positive atomic N