Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire
Chemo-mechanical grinding by applying grain boundary cohesion fixed abrasive for monocrystal sapphire
复制标题
单晶蓝宝石晶界凝聚固定磨料化学机械磨削
DOI：
10.1016/j.precisioneng.2021.01.015
复制
发表时间：
2021-02-13
影响因子：
3.6
通讯作者：
Yuan, Julong
中科院分区：
文献类型：
--
作者：
Wu, Ke;Touse, Daichi;Yuan, Julong
本文提出了一种新的固定磨料工具，即晶界凝聚固定磨料丸（GBCFAP），它能够提供更高的抛光效率，以及更好的表面/亚表面质量的蓝宝石衬底的化学机械研磨（CMG）过程中。本文详细介绍了GBCFAP的制备工艺。结果表明，烧结温度对GBCFAP的强度有重要影响，通过烧结温度可以灵活调节GBFCAP的强度。实验结果表明，推荐的烧结温度范围为600 ~ 650 ℃。C根据当前CMG条件。与传统树脂结合CMG砂轮相比，600？C烧结的GBCFAP CMG砂轮在材料去除率和表面/亚表面质量方面表现更好，因为CMG过程中的化学效应和机械效应得到了很好的平衡。同时，通过TEM观察和XPS定量分析，证实了蓝宝石与Cr2 O3磨料之间的固相反应。
This paper presents a novel fixed abrasive tool namely grain boundary cohesion fixed abrasive pellet (GBCFAP) which is able to provide higher finishing efficiency as well as better surface/subsurface quality of sapphire substrate during the chemo-mechanical grinding (CMG) process. The manufacturing procedures of GBCFAP are introduced in detail in this paper. It is found that the sintering temperature plays an important role to the strength of GBCFAP, and the strength of GBFCAP could be flexibly adjusted by sintering temperature. The experiment result suggests that the recommended sintering temperature ranges from 600 to 650 ?C according to current CMG conditions. Meanwhile, comparing with conventional resin bound CMG wheel, 600 ?C sintered GBCFAP CMG wheel performs better in terms of material removal rate and surface/subsurface quality since the chemical effect and mechanical effect during CMG process are well balanced. Meanwhile, the solid phase reaction between sapphire and Cr2O3 abrasive is demonstrated by TEM observation and XPS quantification.