Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing
Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing
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DOI：
10.1016/j.cirp.2013.03.010
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发表时间：
2013-01-01
影响因子：
4.1
通讯作者：
Namba, Yoshiharu
中科院分区：
文献类型：
--
作者：
Beaucamp, Anthony;Namba, Yoshiharu
为未来的硬X射线望远镜制造超光滑非球面光学器件将需要一个新的工艺链。虽然化学镀镍的金刚石车削可以产生类似于100 nm P-V非球面成型模具，但在复制之前必须去除相关的车削痕迹。提出了一种创新的两步自由曲面光整加工方法，该方法在一个通用的7轴数控平台上结合了流体喷射和旋进气囊抛光。记录了流体射流与磨料类型和压力的去除率和表面纹理关系，并证明了形状校正到27 nm P-V。然后应用称为“连续加工”的新型阀帽工具路径方法，其提供0.28 nm rms的超光滑各向异性表面纹理。(C)2013年CIRP。
Fabricating super-smooth aspheric optics for future hard X-ray telescopes will require a new process chain. Whilst diamond turning of electroless nickel plating can generate similar to 100 nm P-V aspheric molding dies, associated turning marks must be removed before replication. An innovative two-step freeform finishing method is presented, that combines fluid jet and precessed bonnet polishing on a common 7-axis CNC platform. The removal rate and surface texture relationship of fluid jet with abrasive type and pressure is documented, and form correction demonstrated down to 27 nm P-V. A novel bonnet tool-pathing method called "continuous precessing" is then applied, which delivers super-smooth anisotropic surface texture of 0.28 nm rms. (C) 2013 CIRP.