Polymer-based flexible tactile sensor up to 32 x 32 arrays integrated with interconnection terminals
Polymer-based flexible tactile sensor up to 32 x 32 arrays integrated with interconnection terminals
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DOI：
10.1016/j.sna.2009.08.015
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发表时间：
2009-12-01
影响因子：
4.6
通讯作者：
Pak, James Jungho
中科院分区：
文献类型：
--
作者：
Kim, Kunnyun;Lee, Kang Ryeol;Pak, James Jungho
利用聚合物微机械技术和电镀技术制作了集成了互连端子的聚合物基柔性触觉传感器阵列。触觉传感阵列由4×4、8×8、16×16和32×32个传感元件通过可插拔连接器连接而成。触觉传感器阵列和互连端子被一起制造在同一聚合物基板上，以便将它们集成为传感器模块。带有FFC(柔性扁平电缆)的触觉传感器阵列可以通过将柔性电缆插入到板上的可插拔连接器插座中，轻松地与传感器阵列安装PCB板连接。制作的32×32阵列的互连端子个数和间距分别为68和500微米。在单元触觉传感器上施加0~1N的连续法向力，通过集成的互连端子来评估触觉传感器的特性。在0-0.6N范围内，测量的电阻随法向力呈线性增长，但电阻变化率下降到0.6N以上，在0-0.6N范围内，电阻变化率约为2.0%/N，在0.6-1N范围内，电阻变化率约为1%/N。(C)2009爱思唯尔B.V.保留所有权利。
A polymer-based flexible tactile sensor array integrated with interconnection terminals was fabricated with polymer MEMS technologies and electroplating. The tactile sensing arrays were made as 4 x 4,8 x 8, 16 x 16 and 32 x 32 sensing elements connected with a pluggable connector. Both the tactile sensor arrays and the interconnection terminals were fabricated together on the same polymer substrate in order to integrate them as a sensor module. The tactile sensor array with FFC (flexible flat cable) can be easily connected with the sensor array mounting PCB board by inserting the flexible cable into the pluggable connector socket on the board. The number and pitch of the fabricated interconnection terminals for 32 x 32 arrays were 68 and 500 mu m, respectively. Continuous normal force ranging 0-1 N was applied to a unit tactile sensor for evaluating the tactile sensor characteristics through the integrated interconnection terminals. The measured resistance increased linearly with normal force in the range of 0-0.6 N but the resistance variation rate decreased above 0.6 N. The variation rate of the resistance is about 2.0%/N in the range of 0-0.6 N and 1%/N in the range of 0.6-1 N. The characterization of the tactile sensor array for the rod bar and a fingertip was successfully evaluated using the custom designed controller and the window-based 3D display software. (C) 2009 Elsevier B.V. All rights reserved.