Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by sol-gel method

Effect of annealing temperature on the structural and optical properties of ZnO thin films prepared by sol-gel method
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退火温度对溶胶-凝胶法制备ZnO薄膜结构和光学性能的影响

DOI:
10.1007/s11581-010-0468-4
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发表时间:
2010-12-01
期刊:
影响因子:
2.8
通讯作者:
Zhang, Pingyu
Zhang, Pingyu
中科院分区:
化学4区
文献类型:
--
作者:
Zhang, Yidong;Fa, Wenjun;Zhang, Pingyu

文献摘要

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在这项工作中,采用溶胶-凝胶法在玻璃衬底上制备了ZnO薄膜,并在不同温度下煅烧,研究了退火温度对薄膜结构和光学性能的影响。用X射线衍射仪和原子力显微镜分析了样品的结构特征,用紫外-可见分光光度计研究了薄膜的光学性能。结果表明,随着退火温度的升高,所制备的ZnO薄膜均具有高度的c轴择优取向,具有致密的六方纤锌矿结构(mse ufl edu),ZnO薄膜的(002)峰强度、粒径、表面粗糙度和吸光度都有所增加,而透过率和光学带隙则有所减小
In this work, ZnO thin films were synthesized by sot gel method on glass substrates followed by calcinations on different temperatures The effect of annealing temperature on the structure and optical properties of the films was studied The structural characteristics of the samples were analyzed by X-ray diffraction and atomic force microscope The optical properties were studied by a UV-visible spectrophotometer The results show that all the prepared ZnO thin films have a high preferential oriented c-axis orientation with compact hexagonal wurtzite structure With the increasing annealing temperature (mse ufl edu), the intensity of (002) peak, particle size, surface RMS roughness, and absorbance of the ZnO thin films were increased as well On the contrary, the transmittance and optical band gaps were decreased