Rapid prototyping of microfluidic chips in COC
Rapid prototyping of microfluidic chips in COC
复制标题
DOI：
10.1088/0960-1317/17/2/020
复制
发表时间：
2007-02-01
影响因子：
2.3
通讯作者：
Ducree, J.
中科院分区：
文献类型：
--
作者：
Steigert, J.;Haeberle, S.;Ducree, J.
我们提出了一种新颖的，具有成本效益的工艺链，用于在不到5天的时间内快速加工和小批量复制高质量，多规模的微流体聚合物芯片。制造链从初级母版开始，该母版通过成熟的洁净室工艺制成，例如DRIE或基于负SU-8抗蚀剂的表面微加工。小心避免在母模中形成使脱模复杂化的底切。更适合于普通聚合物复制方案如软压花、热压花或注射成型的第二PDMS母版或环氧基母版随后由第一母版铸造。聚合物复制品主要由COC制成，并且与常规微加工母版显示出优异的保真度，同时即使在超过200个循环后也没有显示出退化。也可以使用其他聚合物，例如PMMA。该工艺链还包括表面改性技术，用于整体、长期稳定的亲水涂层和局部疏水贴片，以及基于热粘合的耐用密封。
We present a novel, cost-efficient process chain for fast tooling and small-lot replication of high-quality, multi-scale microfluidic polymer chips within less than 5 days. The fabrication chain starts with a primary master which is made by well-established cleanroom processes such as DRIE or negative SU-8 resist based surface micromachining. The formation of undercuts in the master which would complicate demolding is carefully avoided. Secondary PDMS masters or epoxy-based masters which are more suitable for common polymer replication schemes such as soft-embossing, hot-embossing or injection molding are subsequently cast from the primary masters. The polymer replica are mainly made of COC and show excellent fidelity with the conventionally micromachined master while displaying no degeneration, even after more than 200 cycles. The use of other polymers such as PMMA is also possible. The process chain further includes surface modification techniques for overall, long-term stable hydrophilic coatings and for local hydrophobic patches as well as a durable sealing based on thermal bonding.