A Scanning Electron Microscope With Two Secondary Electron Detectors and Its Application to the Surface Topography Measurements of Magnetic Media
A Scanning Electron Microscope With Two Secondary Electron Detectors and Its Application to the Surface Topography Measurements of Magnetic Media
复制标题
带有两个二次电子探测器的扫描电子显微镜及其在磁性介质表面形貌测量中的应用
DOI：
10.1115/1.2920884
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发表时间：
1992
影响因子：
2.5
通讯作者：
M. Hotta
中科院分区：
文献类型：
--
作者：
K. Tanaka;K. Nishimori;K. Maeda;J. Matsuda;M. Hotta
采用双二次电子探测器扫描电子显微镜（SEM）对磁性介质表面形貌进行了测量。SEM的梯度确定原理基于两个检测器之间的平方信号的差与表面梯度成线性比例的关系。该仪器的最大优点是能够重新定位以进行剖面分析。这对于在磨损试验中以顺序方式在固定位置检查磨损过程是非常有用的。这是证明了两个样品的测量数据薄膜硬盘。
A scanning electron microscope (SEM) with two secondary electron detectors is applied for the surface topography measurement of magnetic media. The principle of gradient determination of the SEM is based on a relation that the difference in the square signals between the two detectors is linearly proportional to surface gradient. The great advantage of the instrument is the capability of relocation for profiling. It is extremely useful for the examination of wear process at a fixed position in a sequential manner during wear testing. This is demonstrated by two sample data of measurement on thin film rigid disks.