Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFET
Microfluidic integrated circuits for signal processing using analogous relationship between pneumatic microvalve and MOSFET
复制标题
利用气动微阀和 MOSFET 之间的类似关系进行信号处理的微流控集成电路
DOI：
10.1109/jmems.2003.815838
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
M. Ishida
中科院分区：
文献类型：
--
作者：
H. Takao;M. Ishida
本文提出了一种新的概念和潜在的演示功能微流控集成电路的MEMS技术。利用MOSFET与膜片式气动微阀的相似关系，构建了微流控集成电路。通过回路传输的信号是流体信号，即流体的压力或流速。本研究中的气动微阀采用类似于MOSFET的小信号等效模型表示。从微阀的制作过程中提取适当的参数，可以预测微流控集成电路的小信号行为。作为流体回路的示例，制造并评估了包括集成的两个微型阀的压力反转放大器。结果，它们显示出与MOS逆变器电路类似的尖锐的压力传递曲线。获得了32.0 dB的最大压力增益，可用于模拟应用中的压力放大。此外，它们还可用作数字应用的压力逆变器逻辑电路。虽然新型微阀电路技术的理论和设计环境尚未建立，但可以实现不同于电子集成电路的多功能流体模拟和数字电路。
In this paper, a new concept and potential demonstration of functional microfluidic integrated circuits using MEMS technology are presented. The fluidic integrated circuits were constructed utilizing analogous relationship between MOSFET and pneumatic microvalve with a diaphragm structure. The signal transmitted through the circuit is the fluidic signal, that is, the pressure or the flow-rate of the fluid. The pneumatic microvalve in this study is expressed by small-signal equivalent model similar to that of a MOSFET. Small signal behavior of microfluidic integrated circuits can be expected using the model, if the parameters in the model are extracted properly from fabricated microvalves. As an example of a fluidic circuit, pressure inverting amplifiers including integrated two microvalves were fabricated and evaluated. As a result, they showed sharp pressure transfer curves similar to MOS inverter circuits. A maximum pressure gain of 32.0 dB was obtained, and it can be used for pressure amplification in analog applications. In addition, they can be used as pressure inverter logic circuits for digital applications. Although the theory and design environment of the new microvalve circuit technology have not been established yet, multifunctional fluidic analog and digital circuits can be realized for special application fields different from electronic integrated circuits.