Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation.
Integrated optical micromachined pressure sensor with spectrally encoded output and temperature compensation.
复制标题
集成光学微机械压力传感器，具有光谱编码输出和温度补偿。
DOI：
10.1364/ao.37.003264
复制
发表时间：
1998
期刊：
影响因子：
1.9
通讯作者：
J. Boyd
中科院分区：
文献类型：
--
作者：
G. D. De Brabander;G. Beheim;J. Boyd
一种很有前途的光学压力传感器将集成光学干涉仪与共享硅衬底上的微机械膜片结合在一起。我们已经演示了这种类型的传感器，它使用不平衡马赫-曾德波导干涉仪和宽带源一起产生频谱编码测量。这种光谱编码机制是有利的，因为它不容易通过光纤传输而退化。我们还演示了通过询问干涉仪的两个偏振本征模式来获得温度补偿压力测量的方法。
A promising type of optical pressure sensor combines an integrated optical interferometer with a micromachined diaphragm on a shared silicon substrate. We have demonstrated a sensor of this type that uses an unbalanced Mach-Zehnder waveguide interferometer together with a broadband source to produce a spectrally encoded measurement. This spectral encoding mechanism is advantageous as it is not readily degraded by transmission through optical fibers. We have also demonstrated a means to obtain a temperature-compensated pressure measurement by interrogating both polarization eigenmodes of the interferometer.