Investigating the change in surface acoustic wave velocity due to the change in adhesion of a SU-8 thin film using a SU-8/AlN/Si SAW sensor
Investigating the change in surface acoustic wave velocity due to the change in adhesion of a SU-8 thin film using a SU-8/AlN/Si SAW sensor
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DOI：
10.1016/j.ijadhadh.2016.02.009
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发表时间：
2016-07
影响因子：
3.4
通讯作者：
M. E. Gowini;W. Moussa
中科院分区：
文献类型：
--
作者：
M. E. Gowini;W. Moussa
