Interaction of plasma-generated water cluster ions with chemically-modified Si surfaces investigated by infrared absorption spectroscopy
Interaction of plasma-generated water cluster ions with chemically-modified Si surfaces investigated by infrared absorption spectroscopy
复制标题
通过红外吸收光谱研究等离子体产生的水簇离子与化学改性硅表面的相互作用
作者：
Ayumi Hirano-Iwata;Ryosuke Matsumura;Teng Ma;Yasuo Kimura;Michio Niwano;and Kazuo Nishikawa
