Thermo-molecular gas-film lubrication (t-MGL) considering temperature distributions and accommodation coefficients: analyses by quasi-free-molecular t-MGL equation
Thermo-molecular gas-film lubrication (t-MGL) considering temperature distributions and accommodation coefficients: analyses by quasi-free-molecular t-MGL equation
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考虑温度分布和调节系数的热分子气膜润滑(t-MGL):通过准自由分子 t-MGL 方程进行分析
DOI:
10.1007/s00542-019-04642-6
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发表时间:
2019
期刊:
影响因子:
--
通讯作者:
Hiroshige Matsuoka
中科院分区:
文献类型:
--
作者:
Shigehisa Fukui;Fumiya Shinohara;Ryota Asada;Hiroshige Matsuoka
In the present paper, the air-bearing characteristics of a fixed plane inclined slider (Case 1) and a step slider flying in either air or He (Case 2) over a running boundary wall with local temperature distributions and imperfect surface accommodation coefficients, the molecular reflections at the surface of which are a mixture of diffuse reflection (α) and specular reflection (1−α) (Maxwell-type reflection), are analyzed using the thermo-molecular gas-film lubrication (t-MGL) equation. In particular, since the minimum spacing is ultra-small (~ 1 nm), the quasi-free-molecular t-MGL equation, in which the gas temperature,τG, is assumed to be that in the free molecular limit,τGfm, defined by temperatures and accommodation coefficients at the disk,τW0andα0, respectively, and those at the slider,τW1andα1, respectively, is used. For a plane inclined slider (Case 1), the fundamental static and dynamic characteristics are analyzed numerically and are compared with the approximation results for an infinite bearing number (t-MGLqfm,Λ→∞). When the spacing is ultra-small and only the running boundary (disk) has a local temperature distribution, the additional static pressure produced by the local boundary temperature distribution is approximately proportional to the equivalent accommodation coefficient γα≡α0(2-α1)/[2{1-(1-α0)(1-α1)}]. For a step slider (Case 2), the following results are revealed: (1) the spacing decreases occur as the accommodation coefficient of the disk,α0, decreasei.e., the ratio of specular reflection at the disk increases, (2) the increases in the minimum spacing due to local temperature distribution are negligible in both air and He because the heat spot size is very small, (3) the decreases in the minimum spacing for a slider flying in He are significant, and (4) the spacing fluctuation caused by a running wavy disk varies according to both the surface accommodation coefficients and the ambient gas (air/He) and can be estimated precisely.
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DOI:
--
发表时间:
2005
期刊:
Micro Systems Technologies Vol.11(in press)
影响因子:
--
作者:
S.Fukui;H.Shimada;K.Yamane;H.Matsuoka
通讯作者:
H.Matsuoka
DOI:
10.1109/20.104755
发表时间:
1990
期刊:
影响因子:
--
作者:
T. Kato;T. Ohkubo;J. Kishigami
通讯作者:
J. Kishigami
DOI:
10.1109/20.950986
发表时间:
2001
期刊:
影响因子:
--
作者:
S. Fukui;Kiyomi Yamane;H. Matsuoka
通讯作者:
H. Matsuoka
DOI:
10.1007/3-7643-7537-x
发表时间:
2006
期刊:
Microsystem Technologies
影响因子:
--
作者:
C. Cercignani
通讯作者:
C. Cercignani
DOI:
10.1299/jsmec1988.33.76
发表时间:
1990
期刊:
Jsme International Journal Series C-mechanical Systems Machine Elements and Manufacturing
影响因子:
--
作者:
S. Fukui;R. Kaneko
通讯作者:
R. Kaneko