Development of fabrication process for aspherical neutron focusing mirror using numerically controlled local wet etching with low-pressure polishing
Development of fabrication process for aspherical neutron focusing mirror using numerically controlled local wet etching with low-pressure polishing
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DOI：
10.1016/j.nima.2010.06.253
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发表时间：
2011-04
影响因子：
1.4
通讯作者：
M. Nagano;F. Yamaga;N. Zettsu;Dai Yamazaki;R. Maruyama;K. Soyama;K. Yamamura
中科院分区：
文献类型：
--
作者：
M. Nagano;F. Yamaga;N. Zettsu;Dai Yamazaki;R. Maruyama;K. Soyama;K. Yamamura
非球面超镜是聚焦波长范围宽的中子束的最有用的光学元件之一。表面粗糙度的改善和镜面尺寸的增大是提高聚焦增益的关键。开发了一种集常规精密磨削、数控局部湿法刻蚀和低压抛光于一体的大型非球面镜片基板的高效高精度加工工艺。采用这种新的加工工艺，成功地制作了400 mm长的平面-椭圆形中子聚焦镜基板，其面形误差为0.39mp-v，表面粗糙度均方根小于0.2 nm。
The aspherical supermirror is among the most useful optics to focus a neutron beam with a wide wavelength range. The improvement of surface roughness and enlargement of mirror size are essential for increasing the focusing gain. A highly efficient and high-precision fabrication process for the substrate of a large aspherical mirror combining conventional precision grinding, numerically controlled local wet etching (NC-LWE) figuring and low-pressure polishing was developed. Using this new fabrication process, a 400mm-long plano-elliptical neutron focusing mirror substrate was successfully fabricated with a figure error of 0.39μm p–v and an rms surface roughness of less than 0.2nm.