Spectroscopic Ellipsometry: Principles and Applications
Spectroscopic Ellipsometry: Principles and Applications
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DOI：
10.1002/9780470060193
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
Hiroyuki Fujiwara;Download Here
中科院分区：
文献类型：
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作者：
Hiroyuki Fujiwara;Download Here
前言。前言。致谢。1椭圆偏振光谱测量导论。1.1椭圆偏振光谱测量法的特点。1.2椭圆偏振光谱测量法的应用。1.3数据分析。1.4发展史。1.5未来展望。参考资料。2光学原理。2.1光的传播。2.2介电材料。2.3光的反射和透射率。2.4光学干涉。参考资料。3光的偏振。3.1偏振光的表示。3.2光学元件。3.3琼斯矩阵。3.4斯托克斯参数。参考资料。4椭圆偏振光谱测量原理。4.1椭圆偏振测量原理。4.2椭圆偏振测量法。4.3椭圆偏振测量仪。4.4测量的精密度和误差。参考资料。5数据分析。5.1对(PSI，Delta)的解释。5.2介电函数模型。5.3有效介质近似。5.4光学模型。5.5数据分析程序。参考资料。6各向异性材料的椭偏测量。6.1光在各向异性材料中的反射和透过。6.2各向异性材料的菲涅耳方程。6.3 4×4矩阵法。6.4各向异性材料(PSI，Delta)的解释。6.5各向异性材料的测量和数据分析。参考资料。7个数据分析实例。7.1绝缘体。7.2半导体。7.3金属/半导体。7.4有机材料/生物材料。7.5各向异性材料。参考资料。8椭圆偏振光谱实时监测。8.1实时监控中的数据分析。8.2通过实时监测观察薄膜生长情况。8.3通过实时监控进行过程控制。参考资料。附录。1三角函数。2光学常数的定义。3导体的麦克斯韦方程。4琼斯-米勒矩阵转换。5 Kramers-Kronig关系。索引。
Foreword. Preface. Acknowledgments. 1 Introduction to Spectroscopic Ellipsometry. 1.1 Features of Spectroscopic Ellipsometry. 1.2 Applications of Spectroscopic Ellipsometry. 1.3 Data Analysis. 1.4 History of Development. 1.5 Future Prospects. References. 2 Principles of Optics. 2.1 Propagation of Light. 2.2 Dielectrics. 2.3 Reflection and Transmission of Light. 2.4 Optical Interference. References. 3 Polarization of Light. 3.1 Representation of Polarized Light. 3.2 Optical Elements. 3.3 Jones Matrix. 3.4 Stokes Parameters. References. 4 Principles of Spectroscopic Ellipsometry. 4.1 Principles of Ellipsometry Measurement. 4.2 Ellipsometry Measurement. 4.3 Instrumentation for Ellipsometry. 4.4 Precision and Error of Measurement. References. 5 Data Analysis. 5.1 Interpretation of (PSI, DELTA). 5.2 Dielectric Function Models. 5.3 Effective Medium Approximation. 5.4 Optical Models. 5.5 Data Analysis Procedure. References. 6 Ellipsometry of Anisotropic Materials. 6.1 Reflection and Transmission of Light by Anisotropic Materials. 6.2 Fresnel Equations for Anisotropic Materials. 6.3 4x4 Matrix Method. 6.4 Interpretation of (PSI, DELTA) for Anisotropic Materials. 6.5 Measurement and Data Analysis of Anisotropic Materials. References. 7 Data Analysis Examples. 7.1 Insulators. 7.2 Semiconductors. 7.3 Metals/Semiconductors. 7.4 Organic Materials/Biomaterials. 7.5 Anisotropic Materials. References. 8 Real-Time Monitoring by Spectroscopic Ellipsometry. 8.1 Data Analysis in Real-Time Monitoring. 8.2 Observation of Thin-Film Growth by Real-Time Monitoring. 8.3 Process Control by Real-Time Monitoring. References. Appendices. 1 Trigonometric Functions. 2 Definitions of Optical Constants. 3 Maxwell's Equations for Conductors. 4 Jones-Mueller Matrix Conversion. 5 Kramers-Kronig Relations. Index.