Focused Laser-Induced Marangoni Dewetting for Patterning Polymer Thin Films
Focused Laser-Induced Marangoni Dewetting for Patterning Polymer Thin Films
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DOI：
10.1002/polb.23906
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发表时间：
2016-01-15
影响因子：
--
通讯作者：
Thomas, Edwin L.
中科院分区：
文献类型：
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作者：
Singer, Jonathan P.;Kooi, Steven E.;Thomas, Edwin L.
聚合物薄膜的高度局部聚焦激光尖峰（FLaSk）加热是一种无需电阻和显影剂的二维（2D）激光直接写入的替代方案，用于在单微米上创建图案，或者通过利用重叠效应，在亚微米尺度上创建图案。FLaSk产生的巨大的时空热梯度和由此产生的热马兰戈尼应力是这种薄膜定向脱湿和图像化的有效手段。本文通过对薄膜厚度、玻璃化转变温度和聚合物迁移率的系统研究，研究了该技术在非晶态聚合物薄膜体系中的普遍适用性。结果表明，重要的参数是薄膜厚度（通过增透涂层效应耦合到光学加热效应）和高温聚合物熔体迁移率，允许产生线宽低至类似1 μ m的单一特征。此外，通过使用聚合物刷、双层、微相分离嵌段共聚物导致额外的剖面操纵效应（即自发的2D模式生成和平坦的顶部剖面）。(C) 2015 Wiley期刊公司
Highly-localized focused laser spike (FLaSk) heating of polymer thin films is a resist-and developer-free alternative to two-dimensional (2D) laser direct write for creating patterns on the single micron or, by exploiting overlap effects, submicron scale. The massive temporal and spatial thermal gradients and resulting thermal Marangoni stresses generated by FLaSk are an effective means for the directed dewetting and patterning of such films. Here, the general applicability of this technique to glassy amorphous polymer thin film systems is investigated through systematic investigation of film thickness, glass transition temperature, and polymer mobility. The results reveal that the important parameters are the film thickness (coupled to the optical heating effects through anti-reflection coating effects) and the high-temperature polymer melt mobility, allowing for generation of single features with linewidths of down to similar to 1 mu m. Further, the introduction of spatial mobility variations by using polymer brushes, bilayers, and microphase separated block copolymers leads to additional profile manipulation effects (i.e. spontaneous 2D pattern generation and flattened top profiles). (C) 2015 Wiley Periodicals, Inc.