DFM metrics for standard cells

DFM metrics for standard cells
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标准单元的 DFM 指标

DOI:
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发表时间:
2006
期刊:
IEEE International Symposium on Quality Electronic Design
影响因子:
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通讯作者:
R. Aitken
R. Aitken
中科院分区:
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文献类型:
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作者:
R. Aitken

文献摘要

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随着工艺几何尺寸的缩小,可制造性设计(DFM)变得越来越重要。传统的设计规则通过/未通过不足以量化DFM符合性。相反,需要度量来比较设计。产量可能是一个理想的指标,但如果没有重要的制造数据,很难客观地计算。本文研究了良好的度量标准所需的质量,并展示了一个似乎很有前途的方法的例子
Design for manufacturability (DFM) is becoming increasingly important as process geometries shrink. Conventional design rule pass/fail is not adequate to quantify DFM compliance. Instead, metrics are needed to compare designs. Yield might be an ideal metric, but is difficult to calculate objectively without significant manufacturing data. This paper investigates the qualities that good metrics require and shows an example of an approach that seems promising