Effects of Pt Sacrificial Layer on Microfabrication in Layered Bismuth-based Ferroelectric Thin Films

Effects of Pt Sacrificial Layer on Microfabrication in Layered Bismuth-based Ferroelectric Thin Films
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Pt牺牲层对层状铋基铁电薄膜微加工的影响

DOI:
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发表时间:
2020
期刊:
Trans. Mat. Res. Soc. Japan
影响因子:
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通讯作者:
and K. Maenaka
and K. Maenaka
中科院分区:
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文献类型:
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作者:
T. Obayashi;M. Kobune;T. Matsunaga;R. Ito;T. Migita;T. Kikuchi;K. Kanda;and K. Maenaka

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