FABMAS: An Agent-Based System for Production Control of Semiconductor Manufacturing Processes
FABMAS: An Agent-Based System for Production Control of Semiconductor Manufacturing Processes
复制标题
FABMAS：基于代理的半导体制造工艺生产控制系统
DOI：
10.1007/978-3-540-45185-3_24
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发表时间：
2003
影响因子：
8.3
通讯作者：
J. Zimmermann
中科院分区：
文献类型：
--
作者：
L. Mönch;Marcel Stehli;J. Zimmermann
在本文中，我们提出了一个基于代理的半导体晶圆制造设施（晶圆厂）的生产控制系统的架构设计的结果。这些制造系统的特点是可重入的产品流，顺序依赖的设置时间，不均匀的并行机器，多样化的产品组合，不同的过程类型的组合，规定的订单到期日和预防性维护，由于困难的技术过程。因此，协调问题必须考虑在设计的生产控制系统，这种类型的制造过程。我们提出了一个分层的生产控制方案。我们使用PROSA参考架构，以形成适当的机构。我们描述了使用C++和C#编程语言和.NET中间件的系统原型的开发。为了允许调查的动态场景的生产过程的仿真，我们建议使用离散事件模拟器AutoSched AP和黑板型数据层作为生产控制系统和模拟器之间的耦合组件。
In this paper, we present results on designing the architecture of an agent-based system for production control of semiconductor wafer fabrication facilities (wafer fabs). These manufacturing systems are characterized by reentrant product flows, sequence dependant setup-times, inhomogenous parallel machines, a diverse product mix, a mix of different process types, prescribed due dates of the orders and preventive maintenance due to difficult technological processes. Hence, coordination issues have to be considered during the design of a production control system for such type of manufacturing processes. We suggest a hierarchical production control scheme. We use the PROSA reference architecture in order to form the proper agency. We describe the development of a system prototype using the C++ and C# programming language and the.NET middleware. In order to allow the investigation of dynamic scenarios by emulation of the production process we suggest the use of the discrete event simulator AutoSched AP and a blackboard type data layer as a coupling component between the production control system and the simulator.