Variation of structural and optical properties of sol-gel TiO2 thin films with catalyst concentration and calcination temperature
Variation of structural and optical properties of sol-gel TiO2 thin films with catalyst concentration and calcination temperature
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DOI：
10.1016/s0167-577x(03)00380-x
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发表时间：
2003-12-01
影响因子：
3
通讯作者：
Hahn, SH
中科院分区：
文献类型：
--
作者：
Ahn, YU;Kim, EJ;Hahn, SH
采用溶胶-凝胶法在石英玻璃上制备了TiO 2薄膜，研究了不同催化剂浓度和煅烧温度对薄膜结构和光学性能的影响。所沉积的TiO 2薄膜是非晶的，并且它们在400-600 ℃转变为锐钛矿相，在800 ℃转变为锐钛矿-金红石相，并且在1000 ℃进一步转变为金红石相。随着催化剂HCl浓度的增加，相变温度降低。TiO 2薄膜的晶粒尺寸随着煅烧温度和催化剂浓度的增加而增加。在TiO 2薄膜中的二次粒子在800 ℃以下通过团聚体内致密化生长，而在800 ℃以上通过团聚体间致密化生长。沉积的TiO 2薄膜在可见光范围内具有高的透明度。在8，00和1000 ℃下煅烧的薄膜在300- 8,00 nm波长范围内的透射率显著降低，这是由于微晶相的变化和颗粒尺寸的增加。TiO 2薄膜的折射率随着煅烧温度和催化剂浓度的增加而增加。另一方面，TiO 2薄膜的孔隙率降低。(C)2003 Elsevier Science B. V.保留所有权利。
TiO2 thin films were prepared on quartz glass by sol-gel process and their structural and optical properties were examined at various catalyst concentrations and calcination temperatures. The as-deposited TiO2 thin films are amorphous, and they transform into the anatase phase at 400-600 degreesC, and into the anatase-rutile phase at 800 degreesC, and further into the rutile phase at 1000 degreesC. The temperature of phase transformation is decreased with the concentration of catalyst HCl. The crystallite size of TiO2 thin films is increased with increasing calcination temperature and catalyst concentration. The secondary particles in the TiO2 thin films grow by intra-agglomerate densification below 800 degreesC, whereas they grow by inter-agglomerate densification above 800 degreesC. The deposited TiO2 thin films have high transparency in the visible range. The transmittance of the films calcined at 8,00 and 1000 degreesC are significantly reduced in the wavelength range of 300-800 nm due to the change of crystallite phase and, increased particle size. The refractive index of TiO2 thin films is increased with increasing calcination temperature and catalyst concentration. On the other hand, the porosity of TiO2 thin film is decreased. (C) 2003 Elsevier Science B.V. All rights reserved.