Spatial characterization of extreme ultraviolet plasmas generated by laser excitation of xenon gas targets
Spatial characterization of extreme ultraviolet plasmas generated by laser excitation of xenon gas targets
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激光激发氙气目标产生的极紫外等离子体的空间表征
DOI：
10.1063/1.1532835
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发表时间：
2003
影响因子：
1.6
通讯作者：
K. Mann
中科院分区：
文献类型：
--
作者：
S. Kranzusch;C. Peth;K. Mann
在哥廷根激光实验室，对激光等离子体源进行了测试，这些激光等离子体源将用于在11至13 nm波长范围内表征光学元件和传感器设备。在所有情况下，通过将Q开关Nd：YAG激光器聚焦到脉冲喷气靶中来产生极紫外（EUV）辐射。通过使用氙或氧作为靶气体，分别获得宽带以及窄带EUV辐射。测试了不同类型的阀门和喷嘴，以优化发射的辐射，最大EUV强度，小光源直径和位置稳定性。这些关键的源参数的调查进行了专门设计的EUV针孔相机，利用标准化的激光束特性的评估算法。此外，一个可旋转的针孔相机的开发，它允许空间和角度分辨的软X射线发射特性的监测。在这个摄像机的帮助下...
At Laser-Laboratorium Gottingen laser-plasma sources were tested, which are going to be used for characterization of optical components and sensoric devices in the wavelength region from 11 to 13 nm. In all cases extreme ultraviolet (EUV) radiation is generated by focusing a Q-switched Nd:YAG laser into a pulsed gas puff target. By the use of xenon or oxygen as target gas, broadband as well as narrowband EUV radiation is obtained, respectively. Different types of valves and nozzles were tested in order to optimize the emitted radiation with respect to maximum EUV intensities, small source diameters, and positional stability. The investigation of these crucial source parameters was performed with specially designed EUV pinhole cameras, utilizing evaluation algorithms developed for standardized laser beam characterization. In addition, a rotatable pinhole camera was developed which allows both spatially and angular resolved monitoring of the soft x-ray emission characteristics. With the help of this camera ...