RAPID COMMUNICATION: Fabrication of ordered arrays of silicon nanopillars at selected sites
RAPID COMMUNICATION: Fabrication of ordered arrays of silicon nanopillars at selected sites
复制标题
快速通信：在选定地点制造有序的硅纳米柱阵列
DOI：
10.1088/0022-3727/35/5/102
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
R. Palmer
中科院分区：
文献类型：
--
作者：
M. Bale;A. Turner;R. Palmer
我们表明，光致抗蚀剂图案化和聚合物球的自组装的组合可用于在选定的表面区域中产生有序的硅纳米柱阵列。在抗蚀剂层中的图案的大小和形状示出调节成核和有序的单层的球体，这是作为金属沉积和反应离子蚀刻的模板的生长。该方法可用于需要在多个长度尺度上的结构有序的光子学中的应用。
We show that a combination of photoresist patterning and self-assembly of polymer spheres can be used to generate ordered arrays of silicon nanopillars in selected surface regions. The size and shape of patterns in the resist layer are shown to regulate the nucleation and growth of ordered monolayers of spheres, which are employed as templates for metal deposition and reactive ion etching. The method may be useful for applications in photonics requiring structural order on multiple length scales.