A New Micro-rate Sensor Based on Shear Horizontal Surface Acoustic Wave Gyroscopic Effect
A New Micro-rate Sensor Based on Shear Horizontal Surface Acoustic Wave Gyroscopic Effect
复制标题
基于剪切水平表面声波陀螺效应的新型微速率传感器
DOI：
10.1143/jjap.49.096602
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发表时间：
2010-01-01
影响因子：
1.5
通讯作者：
Lee, Keekeun
中科院分区：
文献类型：
--
作者：
Wang, Wen;Xu, Fangqian;Lee, Keekeun
在本文中，我们提出了一种基于剪切水平表面声波（SH-SAW）陀螺效应的新型微速率传感器。新型SH-SAW沿着具有重金属化的ST-90度X石英基板传播，表现出优异的温度稳定性、大声速、高机电耦合系数和非常小的传播衰减。使用部分波分析方法建立了这种 SH-SAW 微速率传感器的响应机制。评估了SH-SAW传播路径中的角度检测灵敏度，并研究了金属叉指换能器（IDT）电极厚度对传感器性能的影响，从而实现了制造前的优化设计参数。在同一芯片上制作了两条方向相反、工作频率为 80 MHz 的 SH-SAW 延迟线作为 SAW 振荡器的反馈。采用单相单向换能器（SPUDT）构建延迟线以降低插入损耗。外旋转产生的科里奥利力沿声表面波传播路径作用于粒子，产生伪声表面波，并与初始的SH-声表面波耦合；因此，SAW 速度发生了偏差。同时，差分振荡频率线性变化并用于表征输入角速率。然后，使用精确速率表，对所制造的SH-SAW速率传感器的性能进行了实验评估。角速率高达 2000 deg(-1) 时的灵敏度为 1.268 Hz deg(-1) s(-1)，具有良好的线性度和出色的温度稳定性。 (C) 2010 日本应用物理学会
In this paper, we present a new micro-rate sensor based on the shear horizontal surface acoustic wave (SH-SAW) gyroscopic effect. The new SH-SAW propagating along the ST-90 degrees X quartz substrate with heavy metallization exhibits excellent temperature stability, large acoustic velocity, high electromechanical coupling factors, and very small propagation attenuation. The response mechanism of such an SH-SAW micro-rate sensor was established using partial-wave analysis methods. The angular detection sensitivity in the propagation path of SH-SAW was evaluated and the effect of the metal interdigital transducer (IDT) electrode thickness on the sensor performance was also studied, resulting in the realization of the optimized design parameters prior to fabrication. Two SH-SAW delay lines with a reverse direction and an operation of 80 MHz on the same chip are fabricated as the feedback of SAW oscillators. The single-phase unidirectional transducer (SPUDT) was used to structure the delay lines to decrease the insertion loss. The Coriolis force from the external rotation acts on the particles along the SAW propagation path, then a pseudo SAW was induced, and couples with the initial SH-SAW; thus, the SAW velocity was deviated. Meanwhile, the differential oscillation frequency was changed linearly and used to characterize the input angular rate. Then, using the precise rate table, the performance of the fabricated SH-SAW rate sensor was evaluated experimentally. A sensitivity of 1.268 Hz deg(-1) s(-1) at angular rates of up to 2000 deg s(-1), good linearity, and excellent temperature stability are observed. (C) 2010 The Japan Society of Applied Physics