High-density plasma production for neutralizing negative ion beam
High-density plasma production for neutralizing negative ion beam
复制标题
用于中和负离子束的高密度等离子体生产
DOI：
10.1063/1.1148607
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发表时间：
1998
影响因子：
1.6
通讯作者：
T. Kuroda
中科院分区：
文献类型：
--
作者：
M. Tanaka;M. Bacal;M. Sasao;T. Kuroda
提出了一种利用电子回旋波产生电子回旋共振等离子体的方法。这种方法不受任何截止密度的限制，并且能够产生远超过普通波的临界密度的致密等离子体。实验证明，在低频（2.45 GHz）和低功率（11 kW）微波下，等离子体密度大于1013 cm−3（氩）。介绍了实验结果及其在等离子体中和器中的应用。为了研制具有铌膜壁的等离子体中和剂，正在对铌膜在等离子体环境下的超渗透性进行实验验证。介绍了铌膜泵的设计参数。
An electron cyclotron resonance (ECR) plasma production method using electron cyclotron wave is presented. This method is not subjected to any cutoff-density scaling, and is capable of generating dense plasmas far beyond the critical density of an ordinary wave. It has been demonstrated that a plasma density more than 1013 cm−3 (argon) is obtained with a low frequency (2.45 GHz) and low power (11 kW) microwave. The experimental results and the application to plasma neutralizer are described. The experimental verification of superpermeability of Nb membrane in a plasma environment is in progress to develop a plasma neutralizer with Nb-membrane wall. The design parameters of Nb-membrane pump are presented.