Evolution behavior of helium bubbles and thermal desorption study in helium-charged tungsten film
Evolution behavior of helium bubbles and thermal desorption study in helium-charged tungsten film
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DOI：
10.1016/j.jnucmat.2018.05.033
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发表时间：
2018-09
影响因子：
3.1
通讯作者：
Le Wang;T. Hao;Bang-Lei Zhao;Tao Zhang;Q. Fang;Changsong Liu;Xianping Wang;Lei Cao
中科院分区：
文献类型：
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作者：
Le Wang;T. Hao;Bang-Lei Zhao;Tao Zhang;Q. Fang;Changsong Liu;Xianping Wang;Lei Cao
为了研究氦泡形成和生长的演化行为，采用射频磁控溅射法在He和Ar混合气氛中制备了含氦W薄膜，并分别在500 °C、700 °C和1000 °C下退火2 h。采用X射线衍射（XRD）、扫描电子显微镜（SEM）和透射电子显微镜（TEM）对薄膜退火前后的微观结构进行了表征。在退火前后的薄膜中均存在大量的He泡。气泡尺寸随退火温度的升高而增大，但所有样品中的气泡尺寸均小于3nm。随着退火温度的升高，纳米硬度有降低的趋势。在1000 °C范围内，沉积态薄膜的热脱附谱（TDS）中出现4个He脱附峰，而在700 °C和1000 °C退火后，这些峰完全消失或向高温方向移动。突出的TDS峰可以归因于间隙He原子从填充氦的W膜中的扭曲晶格中的捕获位点的释放。
In order to investigate the evolution behavior of the formation and growth of He bubble, helium-charged W films have been prepared by radio frequency (RF) magnetron sputtering in a mixed atmosphere of He and Ar as well as the annealing were performed at different temperatures at 500 °C, 700 °C and 1000 °C for 2 h, respectively. Microstructure of the films before/after the annealing were characterized by using X-ray diffraction (XRD), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). There are a number of He bubbles in the films both before and after the annealing. The bubble size increases with increasing the annealing temperature but the bubble sizes in all samples are less than 3 nm. Nanohardness demonstrates a decrease tendency with increasing the annealing temperature. There are four He desorption peaks in thermal desorption spectroscopy (TDS) spectra within the range of 1000 °C for the as-deposited film, while they disappear completely or shift toward high temperature for the samples annealed at 700 °C and 1000 °C. The prominent TDS peaks can be attributed to the release of the interstitial He atoms from the trapping sites in the distorted lattice in the helium-charged W films.