Enhanced chemical vapor deposition of diamond by wavelength-matched vibrational excitations of ethylene molecules using tunable CO2 laser irradiation
Enhanced chemical vapor deposition of diamond by wavelength-matched vibrational excitations of ethylene molecules using tunable CO2 laser irradiation
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DOI：
10.1063/1.3082090
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发表时间：
2009-03-15
影响因子：
3.2
通讯作者：
Lu, Y. F.
中科院分区：
文献类型：
--
作者：
Ling, H.;Xie, Z. Q.;Lu, Y. F.
利用可调谐二氧化碳(CO2)激光器对乙烯(C2H4)分子进行波长匹配的振动激发，以C2H4、乙炔(C2H2)和氧气(O-2)为前驱体气体，在露天条件下显著提高了金刚石的化学气相沉积(CVD)。在CVD过程中，选择了C2H4分子的CH2-wag振动模(nu(7))来实现共振激发。将波长为10.591和10.532微米的激光应用于化学气相沉积过程中，比较了C2H4激发和金刚石沉积。与普通CO_2激光器产生的10.591微米激光相比，波长为10.532微米的激光能更有效地激发甲烷分子。在功率为800W、波长为10.532µm的激光照射下，金刚石薄膜的晶粒度增加了400%，薄膜厚度增加了300%。金刚石晶体的质量也得到了显著提高。
Wavelength-matched vibrational excitations of ethylene (C2H4) molecules using a tunable carbon dioxide (CO2) laser were employed to significantly enhance the chemical vapor deposition (CVD) of diamond in open air using a precursor gas mixture of C2H4, acetylene (C2H2), and oxygen (O-2). The CH2-wag vibration mode (nu(7)) of the C2H4 molecules was selected to achieve the resonant excitation in the CVD process. Both laser wavelengths of 10.591 and 10.532 mu m were applied to the CVD processes to compare the C2H4 excitations and diamond depositions. Compared with 10.591 mu m produced by common CO2 lasers, the laser wavelength of 10.532 mu m is much more effective to excite the C2H4 molecules through the CH2-wag mode. Under the laser irradiation with a power of 800 W and a wavelength of 10.532 mu m, the grain size in the deposited diamond films was increased by 400% and the film thickness was increased by 300%. The quality of the diamond crystals was also significantly enhanced.