Quantitative analysis of hydrogen in amorphous films of hydrogenated carbon nitride
Quantitative analysis of hydrogen in amorphous films of hydrogenated carbon nitride
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DOI：
10.1143/jjap.40.7007
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发表时间：
2001-12-01
期刊：
影响因子：
--
通讯作者：
Saitoh, H
中科院分区：
文献类型：
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作者：
Ohkawara, Y;Ohshio, S;Saitoh, H
氢化碳氮化物的非晶相a-CNx:H(0小于或等于x小于或等于1)膜可以具有由sp(2)-和sp(3)-杂化材料的混合物组成的簇，簇尺寸为0.2-2nm。氢末端限制了碳和氮化碳簇的尺寸。它还影响样品的机械性能。在本实验中，利用弹性反冲检测分析（ERDA）、纳米压痕技术和拉曼光谱研究了碳及相关材料的氢含量与机械性能之间的关系。样品硬度分为三类：机械软a-CNx:H（硬度：1-8 GPa）、机械硬a-CNx:H（8-30 GPU）和硬氢化无定形碳（a-C:H）（大于30 GPa）。对于软a-CNx:H、硬a-CNx:H和硬a-C:H，样品的氢含量分别为10-50 at.%、5-40 at.%和小于3 at.%。
The amorphous phase of hydrogenated carbon nitride, a-CNx:H (0 less than or equal to x less than or equal to 1), films may have clusters consisting of a mixture of sp(2)- and sp(3)-hybridized materials with cluster sizes of 0.2-2 nm. The hydrogen termination limits the size of the carbon and carbon nitride clusters. It also influences the mechanical properties of the sample. In this experiment, the relationship between the hydrogen content and the mechanical properties of carbon and related materials was investigated using elastic recoil detection analysis (ERDA), nanoindentation techniques and Raman spectroscopy. The samples were classified into three categories of hardness: mechanically soft a-CNx:H (hardness: 1-8 GPa), mechanically hard a-CNx:H (8-30 GPU) and hard hydrogenated amorphous carbon (a-C:H) (more than 30 GPa). The hydrogen contents of the sample were 10-50 at.%, 5-40 at.%, and less than 3 at.% for soft a-CNx:H, hard a-CNx:H and hard a-C:H, respectively.