Production of Predominantly Anatase Thin Films on Various Grades of Steel and Other Metallic Substrates From TiCl 4 and Ethyl Acetate by Atmospheric Pressure CVD
Production of Predominantly Anatase Thin Films on Various Grades of Steel and Other Metallic Substrates From TiCl 4 and Ethyl Acetate by Atmospheric Pressure CVD
复制标题
采用常压 CVD 方法用 TiCl 4 和乙酸乙酯在各种等级的钢和其他金属基材上生产以锐钛矿为主的薄膜
DOI：
10.1002/cvde.201106964
复制
发表时间：
2012
影响因子：
--
通讯作者：
Cross A
中科院分区：
文献类型：
--
作者：
Cross A
采用TiCl4和乙酸乙酯的常压化学气相沉积法（AP CVD），在加热到500 °C的不同衬底上沉积了TiO2薄膜。研究的基材为四种不同等级的不锈钢（304、304L、316和316L）、钛金属、镀金钛金属和镀金不锈钢（316级）。通过拉曼光谱（RS）分析TiO 2膜以确定存在的TiO 2的百分比。在所有的基材上都产生了占主导地位的薄膜，证明了这种方法的多功能性。扫描电子显微镜（SEM）图像揭示了高金红石含量和较低金红石含量的区域之间的颗粒尺寸的显著差异，指示金红石和金红石颗粒之间的生长速率的差异。选定的样品被证明是光催化活性的降解刃天青染料的紫外光。降解速率明显快于自清洁Saint Gobain Bioclean™。
TiO2thin films are deposited by atmospheric pressure (AP)CVD of TiCl4and ethyl acetate on various substrates heated to 500 °C. The substrates investigated are four different grades of stainless steel (304, 304L, 316, and 316L), titanium metal, gold‐coated titanium metal, and gold‐coated stainless steel (316 grade). The TiO2films are analyzed by Raman spectroscopy (RS) to determine the percentage of anatase present. Predominantly anatase films are produced on all the substrates, demonstrating the versatility of this method. Scanning electron microscopy (SEM) images reveal a marked difference in particle size between regions of high anatase content and lower anatase content, indicative of a difference in growth rate between anatase and rutile particles. Selected samples are shown to be photocatalytically active by degradation of resazurin dye by UV light. The rate of degradation is significantly faster than on the self‐cleaning Saint Gobain Bioclean™.