Mid‐infrared suspended waveguide platform and building blocks
Mid‐infrared suspended waveguide platform and building blocks
复制标题
中红外悬浮波导平台和积木
DOI：
10.1049/iet-opt.2018.5067
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发表时间：
2019
影响因子：
1.6
通讯作者：
Í. Molina
中科院分区：
文献类型：
--
作者：
A. Sánchez;J. Wangüemert;J. Soler Penadés;A. Ortega;M. Nedeljkovic;R. Halir;Faysal El Mokhtari Mimun;Yolanda Xu Cheng;Z. Qu;A. Khokhar;A. Osman;W. Cao;C. Littlejohns;P. Cheben;G. Mashanovich;Í. Molina
在这项工作中，作者介绍了他们在中红外波长范围的平台开发方面的最新进展，该平台基于带有亚波长超材料包层的悬浮硅波导。该平台具有一定的内在优势，使其在分子指纹领域的传感应用中具有很大的前景。具体来说，它可以覆盖硅的全透明窗口（高达8 μm的波长），只需要一个光刻蚀刻步骤，并且可以设计为强光-物质相互作用。讨论了在3.8 μm和7.7 μm两种不同波长下工作的一套完整的基本构件的设计规则、制作工艺的实际方面和实验结果。λ下的传输损耗低至0.82 dB/cm
In this work, the authors present their recent progress in the development of a platform for the mid-infrared wavelength range, based on suspended silicon waveguides with subwavelength metamaterial cladding. The platform has some intrinsic advantages, which make it a very promising candidate for sensing applications in the molecular fingerprint region. Specifically, it can cover the full transparency window of silicon (up to a wavelength of 8 μm), only requires one lithographic etch-step and can be designed for strong light-matter interaction. Design rules, practical aspects of the fabrication process and experimental results of a complete set of elemental building blocks operating at two very different wavelengths, 3.8 and 7.7 μm, are discussed. Propagation losses as low as 0.82 dB/cm at λ
0
= 3.8 μm and 3.1 dB/cm at λ
0
= 7.7 μm are attained for the interconnecting waveguides.