FAST OXYGEN SENSORS BASED ON SPUTTERED STRONTIUM-TITANATE
FAST OXYGEN SENSORS BASED ON SPUTTERED STRONTIUM-TITANATE
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DOI：
10.1016/0925-4005(91)80183-k
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发表时间：
1991-05-01
影响因子：
8.4
通讯作者：
MEIXNER, H
中科院分区：
文献类型：
--
作者：
GERBLINGER, J;MEIXNER, H
介绍了基于溅射钛酸锶薄膜的氧传感器的制备方法。与块状材料一样，薄膜表现出p型和n型导电性，这取决于氧分压。在950℃下使用氩气和氧气的混合物，由于氧分压的变化，可以检测到响应时间低于5毫秒。由于废气中的温度在λ = 1时达到最大值，因此可以分离出快速气体和较低温度对la掺杂SrTiO3传感器信号的影响。
The preparation of oxygen sensors based on sputtered strontium titanate films is described. Like bulk materials, the thin films show p-type and n-type conductivity which depends on the oxygen partial pressure. Using mixtures of argon and oxygen at 950-degrees-C, response times lower than 5 ms can be detected due to a change in the oxygen partial pressure. Because the temperature in an exhaust gas reaches its maximum value at lambda = 1, fast gas and lower temperature effects on the sensor signal of La-doped SrTiO3 can be separated.