Scanning Measurement of Surface Error and Thickness Variation of Hemispherical Resonator
Scanning Measurement of Surface Error and Thickness Variation of Hemispherical Resonator
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DOI:
10.1364/ao.467742
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
Wenwen Lu
中科院分区:
文献类型:
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作者:
Dede Zhai;Jingyang Guo;Shanyong Chen;Wenwen Lu