Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors
Critical parameters influencing the EUV-induced damage of Ru-capped multilayer mirrors
复制标题
影响钌覆盖多层反射镜 EUV 诱发损伤的关键参数
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
M. Chandhok
中科院分区：
文献类型：
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作者：
S. Hill;I. Ermanoski;C. Tarrio;T. Lucatorto;T. Madey;S. Bajt;M. Fang;M. Chandhok
在NIST同步加速器设施中对Ru盖多层反射镜(MLM)进行的耐久性测试表明，在以水为主的环境中，EUV辐射造成的损伤是非线性的，可能受到竞争的氧化和碳沉积过程的影响。来自两个不同环境暗室的同步结果揭示了反射率损失与允许的水蒸气分压、环境背景气体成分、暗室内热丝的存在或不存在、EUV强度和辐射剂量之间的非直观关系。我们讨论了可能的机制，并提出了进一步的实验来测试它们。从加速试验中确定传销寿命是一项非常困难的任务。至关重要的是，任何寿命测试程序都包括重复暴露以确保一致性，如果可能，还应在多个设施中进行测试。
Endurance testing of Ru-capped multilayer mirrors (MLMs) at the NIST synchrotron facility has revealed that the damage resulting from EUV irradiation in a water-dominated environment is nonlinear and may be influenced by competing oxidation and carbon-deposition processes. Concurrent results from two different environmental chambers reveal non-intuitive relationships between reflectivity loss and the admitted water-vapor partial pressure, the ambient background-gas composition, the presence or absence of hot filaments in the chamber, the EUV intensity and the irradiation dose. We discuss possible mechanisms and propose further experiments to test them. Determining the MLM lifetime from accelerated tests is a very difficult task. It is crucial that any lifetime testing procedure involves duplicate exposures for consistency, and, if possible, testing in multiple facilities.