Patterned growth and transfer of ZnO micro- and nanocrystals with size and location control
Patterned growth and transfer of ZnO micro- and nanocrystals with size and location control
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DOI：
10.1002/adma.200703102
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发表时间：
2008-04-21
影响因子：
29.4
通讯作者：
Jacobs, Heiko O.
中科院分区：
文献类型：
--
作者：
Cole, Jesse J.;Wang, Xinyu;Jacobs, Heiko O.
报道了一种可以控制位置、取向、尺寸和形状的氧化锌晶体的制备和转移方法。该工艺使用氧等离子体处理结合镁掺杂GaN衬底上的光致抗蚀剂图案来限定具有100纳米尺度尺寸的窄成核区域和附着点。横向外延过生长遵循成核以产生图中所示的单晶ZnO。
A method to fabricate and transfer crystalline ZnO with control over location, orientation, size, and shape is reported. The process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium-doped GaN substrates to define narrow nucleation regions and attachment points with 100 nanometer scale dimensions. Lateral epitaxial overgrowth follows nucleation to produce single-crystalline ZnO shown in the figure.