DLC coating of interior surfaces of steel tubes by low energy plasma source ion implantation and deposition
DLC coating of interior surfaces of steel tubes by low energy plasma source ion implantation and deposition
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DOI：
10.1016/j.apsusc.2014.03.064
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发表时间：
2014-08
影响因子：
6.7
通讯作者：
K. Baba;R. Hatada;S. Flege;W. Ensinger
中科院分区：
文献类型：
--
作者：
K. Baba;R. Hatada;S. Flege;W. Ensinger
等离子体源离子注入（PSII）工艺可用于管的内表面的处理。通常，这是用10 keV或更高的更高离子能量完成的。DLC膜的最终膜厚度和性质通常显示出对位置的依赖性，即与管边缘的距离。为了研究这种效应是否也存在于较低的能量下（如果存在，程度如何），在-5 kV的负脉冲电压下进行沉积。以乙炔为等离子体气体，在衬底上沉积了类金刚石薄膜。采用内径为20 mm、长分别为100 mm和200 mm的不锈钢管作为基体，研究了在不同位置下的膜厚分布、膜的成分、结构、表面形貌和摩擦系数，并与高能量离子处理的结果进行了比较。
The plasma source ion implantation (PSII) process can be used for the treatment of the interior surfaces of tubes. Typically, this is done with higher ion energies of 10 keV or more. The resulting film thickness and the properties of the DLC film usually show a dependence on position, i.e. the distance from the edge of the tube. In order to investigate whether this effect is also present with lower energies (and if so, to what extent), deposition was carried out at negative pulse voltages of −5 kV. A diamond-like carbon (DLC) film was deposited by using acetylene as the plasma gas. The substrate consisted of stainless steel tubes with an inner diameter of 20 mm and a length of 100 and 200 mm, respectively.The distribution of the thickness, film composition, structure, surface morphology and friction coefficient as a function of the position inside the tube were investigated.The results of this low energy treatment were compared with investigations which employed higher ion energies.