Corrosion-Resistive and Low Specific Contact Resistance Ohmic Contacts to Semiconducting Diamonds Using Nanocarbon Electrodes
Corrosion-Resistive and Low Specific Contact Resistance Ohmic Contacts to Semiconducting Diamonds Using Nanocarbon Electrodes
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使用纳米碳电极与半导体金刚石进行耐腐蚀且低比接触电阻的欧姆接触
DOI：
10.1002/pssa.202200627
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发表时间：
2022
期刊：
影响因子：
--
通讯作者：
and Tsuyoshi Yoshitake
中科院分区：
文献类型：
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作者：
Sreenath Mylo Valappil;Abdelrahman Zkria;Shinya Ohmagari;Hiroshi Naragino;Hiromitsu Kato;and Tsuyoshi Yoshitake
金刚石基先进器件的实现与实际欧姆接触的制造是相互关联的。与硼掺杂相反，界面碳化物形成钛基传统欧姆接触的磷掺杂金刚石由于高接触电阻而在器件制造中受到限制。在此，通过同轴电弧等离子枪在半导体金刚石上沉积纳米碳欧姆接触，并探索了它们的复合结构，以促进优异的接触性能。在重磷掺杂金刚石上进行了纳米碳欧姆接触和传统钛基接触之间的比较电学表征，它们的比接触电阻表现出一阶下降。除了低接触电阻之外，理想的欧姆电极还应具有良好的机械附着力和耐腐蚀性，适合器件应用。分析了 n 型金刚石/纳米碳在沸腾 H2SO4+ HNO3 溶液的极端腐蚀环境下的接触行为。与传统的钛基接触相比，纳米碳欧姆接触表现出优异的耐腐蚀性和机械附着力。掺硼金刚石上的纳米碳接触也观察到类似的趋势。酸处理过程对纳米碳接触转移长度的影响不大，表明金刚石/纳米碳界面紧密结合，并积极建议它们在高腐蚀性和恶劣环境中的应用。
The realization of diamond‐based advanced devices is interrelated with the fabrication of practical ohmic contacts. Contrary to boron‐doped, the phosphorus‐doped diamonds with interface carbide forming Ti‐based conventional ohmic contacts find their limitation in device fabrication due to the high contact resistance. Herein, nanocarbon ohmic contacts are deposited by a coaxial arc plasma gun on semiconducting diamonds, and their composite structure which facilitates exceptional contact properties is explored. A comparative electrical characterization between nanocarbon ohmic contacts and conventional Ti‐based contacts is performed on a heavily phosphorus‐doped diamond, and they exhibited one‐order declination in specific contact resistance. In addition to the low contact resistance, an ideal ohmic electrode is preferable to have good mechanical adhesion and corrosion resistance for device applications. The contact behavior of n‐type diamond/nanocarbon against an extremely corrosive environment realized by boiling H2SO4+ HNO3solution is analyzed. The nanocarbon ohmic contacts exhibit excellent corrosion resistance and mechanical adhesion over conventional Ti‐based contacts. A similar trend is also observed for nanocarbon contacts on boron‐doped diamonds. The modest effect on the transfer length of the nanocarbon contacts with respect to acid treatment sessions indicates a tightly bonded diamond/nanocarbon interface and actively suggests their application in highly‐corrosive and harsh environments.