Interaction of laser-generated surface acoustic pulses with fine particles: Surface cleaning and adhesion studies
Interaction of laser-generated surface acoustic pulses with fine particles: Surface cleaning and adhesion studies
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DOI：
10.1063/1.368367
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发表时间：
1998-09-01
影响因子：
3.2
通讯作者：
Maznev, AA
中科院分区：
文献类型：
--
作者：
Kolomenskii, AA;Schuessler, HA;Maznev, AA
高振幅声表面波（SAW）中与表面加速度相关的机械力将颗粒从表面分离。定量研究了聚焦激光激发纳秒声表面波脉冲去除硅片中微米级颗粒的过程。已经观察到垂直和水平颗粒位移。结果表明，对于纳秒SAW脉冲，表面加速度的极限约为10（10）m/s（2）是由材料的断裂设定的，并且对应于去除大于约0.05 μ m的颗粒。此外，激发的SAW脉冲的非线性变换导致表面加速度的增加，并有助于清洁过程将其扩展到甚至更小的颗粒尺寸。该技术适用于真空，并提高了清洁的能量效率，因为不仅在照射区域中，而且在SAW脉冲传播所覆盖的更广泛的区域中去除颗粒。它也可用于测定附着力的Hamaker常数。(C)1998年美国物理学会。[S0021-8979（98）02317-2]。
The mechanical forces associated with the surface acceleration in high-amplitude surface acoustic waves (SAWs) detach the particles from the surface. The removal of micron sized particles with a nanosecond SAW pulse excited by a focused laser beam in a silicon wafer was quantitatively investigated. Both vertical and horizontal particle displacements have been observed. It is shown that for nanosecond SAW pulses the limit of the surface acceleration of about 10(10) m/s(2) is set by the fracture of the material and corresponds to the removal of particles larger than about 0.05 mu m. In addition, the nonlinear transformation of the excited SAW pulses results in an increase of the surface acceleration and contributes to the cleaning process extending it to even smaller particle dimensions. The technique is applicable in vacuum and improves the energetic effectiveness of the cleaning due to the removal of particles not only in the irradiated region, but also in the wider area covered by the SAW pulse propagation. It can be also used for the determination of the Hamaker constant of the adhesion force. (C) 1998 American Institute of Physics. [S0021-8979(98)02317-2].