Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology
复制标题
开发用于精密线性平台计量的紧凑型光纤耦合六自由度测量系统
DOI：
10.1063/1.4953335
复制
发表时间：
2016
影响因子：
1.6
通讯作者：
Ellis, Jonathan D.
中科院分区：
文献类型：
--
作者：
Yu, Xiangzhi;Gillmer, Steven R.;Woody, Shane C.;Ellis, Jonathan D.
