Integrated TbDyFe Film on a Single‐Crystal Diamond Microelectromechanical Resonator for Magnetic Sensing
Integrated TbDyFe Film on a Single‐Crystal Diamond Microelectromechanical Resonator for Magnetic Sensing
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DOI：
10.1002/pssr.202100352
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发表时间：
2021-07
期刊：
影响因子：
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通讯作者：
Xiulin Shen;Huanying Sun;L. Sang;M. Imura;Y. Koide;S. Koizumi;M. Liao
中科院分区：
文献类型：
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作者：
Xiulin Shen;Huanying Sun;L. Sang;M. Imura;Y. Koide;S. Koizumi;M. Liao
作为一种超稳定材料，单晶金刚石（SCD）在微机电系统（MEMS）的应用中具有非凡的可靠性。为满足磁传感器对高灵敏度和高稳定性的要求，采用射频磁控溅射技术成功制备了集成TbDyFe薄膜的SCD MEMS谐振器。在550℃下退火3 h后，器件热稳定，传感性能得到改善，磁灵敏度达到5.34 Hz mT−1。由于TbDyFe薄膜的超磁致伸缩，估计最小可探测力达到1.65 × 10−14 N。SCD MEMS磁传感器的实现表明了磁传感领域的显著进步，并表明SCD MEMS在快速、小型和节能传感器应用方面具有可预见的潜力。
As an ultrastable material, single‐crystal diamond (SCD) has been proven to have extraordinary reliability in the application of microelectromechanical systems (MEMS). To satisfy the requirements of high sensitivity and high stability of magnetic sensors, SCD MEMS resonators integrated with TbDyFe thin film are successfully fabricated by radio‐frequency magnetron sputtering. The device is thermally stable and the sensing performance is improved after annealing at 550 °C for 3 h. A high magnetic sensitivity of 5.34 Hz mT−1 is achieved. The estimated minimum detectable force reaches 1.65 × 10−14 N due to the advantage of giant magnetostriction of the TbDyFe thin film. The realization of SCD MEMS magnetic sensor demonstrates a visible progress in the field of magnetic sensing and indicates a foreseeable potential of SCD MEMS in the application of fast, small, and energy‐efficient sensors.