Preparation of (11n) Oriented Bi2Sr2CaCu2O8+x Thin Films by the Metal-organic Decomposition Method
Preparation of (11n) Oriented Bi2Sr2CaCu2O8+x Thin Films by the Metal-organic Decomposition Method
复制标题
金属有机分解法制备(11n)取向Bi2Sr2CaCu2O8 x 薄膜
DOI：
10.1016/j.phpro.2015.05.100
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
T. Ishibashi
中科院分区：
文献类型：
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作者：
Y. Yamada;N. Mori;T. Atsumi;T. Kato;T. Ishibashi
报道了用金属-有机分解法在钛酸锶(110)衬底上制备(11n)取向的Bi2Sr2CaCu2O8+x(Bi2212)薄膜，并用X射线衍射仪和扫描电子显微镜对其进行了表征。通过控制沉积后退火条件(温度640℃≤Ta≤780℃，时间30min≤ta≤120min)，在Ta=780℃，Ta=30min的条件下得到了只有Bi2212(117)X射线衍射峰的薄膜。此外，通过形成双层结构的薄膜，发现薄膜具有更好的结晶度。在扫描电子显微镜和电阻率测量的基础上，讨论了薄膜的性质。
We report on the preparation of (11n) oriented thin films of Bi2Sr2CaCu2O8+x(Bi2212), which were fabricated by the metal-organic decomposition method on SrTiO3(110) and characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM) measurements. By controlling the post-deposition annealing condition (temperature 640 °C ≤Ta≤ 780 °C and time 30 min ≤ta≤ 120 min), films with only the Bi2212 (117) XRD peak were obtained under the conditionTa= 780 °C andta= 30 min. Furthermore, by forming films with a double-layer structure, films are found to have better crystallinity. Film properties are discussed on basis of SEM and resistivity measurements.