Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review.
Tethered and Untethered 3D Microactuators Fabricated by Two-Photon Polymerization: A Review.
复制标题
通过双光子聚合制造的系留和非系留 3D 微执行器：综述
DOI：
10.3390/mi12040465
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发表时间：
2021-04-20
期刊：
影响因子：
3.4
通讯作者：
Zhang L
中科院分区：
文献类型：
--
作者：
Lao Z;Xia N;Wang S;Xu T;Wu X;Zhang L
微致动器可以将外部刺激转化为微尺度的机械运动，因其可用于构建微机电系统（MEMS）和/或微型机器人而引起广泛关注，在无创手术、靶向输送等众多领域得到广泛应用。和生物医学机器。与传统的2D MEMS器件相比，3D微致动器为研究刺激响应功能器件提供了一个新的平台。然而，传统的基于光刻的平面加工技术不足以构建3D微结构。为了解决这个问题，研究人员提出了许多策略，其中3D激光打印由于其多功能性，可调节性和灵活性而成为在微尺度上创建智能设备的前瞻性技术。在这里，我们回顾了最近的进展，刺激响应的3D微致动器制作与3D激光打印根据不同的刺激。最后，对三维激光打印微致动器的设计、制造、控制和应用进行了展望，以期为相关研究提供参考。
Microactuators, which can transform external stimuli into mechanical motion at microscale, have attracted extensive attention because they can be used to construct microelectromechanical systems (MEMS) and/or microrobots, resulting in extensive applications in a large number of fields such as noninvasive surgery, targeted delivery, and biomedical machines. In contrast to classical 2D MEMS devices, 3D microactuators provide a new platform for the research of stimuli-responsive functional devices. However, traditional planar processing techniques based on photolithography are inadequate in the construction of 3D microstructures. To solve this issue, researchers have proposed many strategies, among which 3D laser printing is becoming a prospective technique to create smart devices at the microscale because of its versatility, adjustability, and flexibility. Here, we review the recent progress in stimulus-responsive 3D microactuators fabricated with 3D laser printing depending on different stimuli. Then, an outlook of the design, fabrication, control, and applications of 3D laser-printed microactuators is propounded with the goal of providing a reference for related research.
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影响因子：
16.6
作者：
Alcântara CCJ;Landers FC;Kim S;De Marco C;Ahmed D;Nelson BJ;Pané S
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Pané S
DOI：
10.1073/pnas.1917125117
发表时间：
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影响因子：
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