Thermodynamic properties and phase equilibria in the silicon-phosphorous system
Thermodynamic properties and phase equilibria in the silicon-phosphorous system
复制标题
硅-磷体系的热力学性质和相平衡
DOI：
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发表时间：
2000
期刊：
影响因子：
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通讯作者：
A. Kodentsov
中科院分区：
文献类型：
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作者：
A. Zaitsev;N. E. Shelkova;A. Kodentsov
在1507~1831K温度范围内，用克努森喷发质谱仪和静态方法研究了磷含量为0.09~26.5at.%的Si-P熔体的气相组成和热力学性质，得到了包含约100个不同浓度和/或温度下磷活度的代表性实验数据。在假设熔体中存在SiP和Si2P络合物的情况下，热力学特性随温度和浓度的变化用理想缔合溶液模型近似。计算了相图上液相稳定区的边界，与已有的实验数据吻合较好。
Knudsen effusion mass spectrometry and a static method were used to study the vapor composition and the thermodynamic properties of the Si-P melt with the phosphorous content from 0.09 to 26.5 at.% in the temperature range 1507 to 1831 K. A representative file of experimental data comprising about 100 values of phosphorus activity at various concentrations and/or temperatures was obtained. The thermodynamic characteristics as functions of temperature and concentration were approximated by the ideal associated-solution model under the assumption that SiP and Si2P complexes exist in the melt. The boundaries of the region of liquid phase stability on the phase diagram were computed, and agreement with the available experimental information was obtained.