Innovative actuators and tools for micro-nano mechatronics
Innovative actuators and tools for micro-nano mechatronics
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DOI：
10.1109/mhs.2005.1589955
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发表时间：
2005-11
期刊：
影响因子：
--
通讯作者：
T. Higuchi
中科院分区：
文献类型：
--
作者：
T. Higuchi
致动器在各个领域的应用已经增加。在工业中，精确、高速的定位是最重要的技术之一。在磁盘存储器等计算机外围设备中，为了满足产品的厚度和重量减小的要求，需要小而薄的致动器。在某些情况下，传统的执行器似乎难以满足这些新的和先进的要求。因此，寻找新的致动器已被激活最近。特别地，在MEMS领域中，其中占主导地位的物理规则不同于通常尺寸的物理规则，已经提出并开发了利用静电力、热变形、压电材料、形状记忆等的新的小型致动器。在这些新型驱动器中，以冲击驱动机构和声表面波马达为例介绍了压电驱动器。作为利用静电力的致动器和操纵的例子，描述了大功率静电马达、薄膜静电马达、颗粒和液滴的静电输送装置以及静电悬浮。
Applications of actuators have increased in various fields. In industry, precise and high speed positioning is one of the most important technologies. In peripheral machines for computers like disc memories, small and thin actuators are necessary to satisfy the demand of reduction of thickness and weight of the products. In some cases conventional actuators seem to be difficult to satisfy these new and advanced demands. Therefore, seeking for new actuators has been activated recently. Especially, in the field of MEMS, where the dominant physical rules are different from those of the usual size, new small actuators utilizing electrostatic force, heat deformation, piezoelectric materials, shape memory, and so on have been proposed and developed. Among the new actuators, impact drive mechanism and surface acoustic wave motor are introduced as examples of piezoactuators. And as examples of actuators and manipulations using electrostatic force, powerful electrostatic motor, thin film electrostatic motor, electrostatic transportation devices of particles and droplets, and electrostatic suspension are described.