Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation
Sub-Half-Micron Periodic Structures on Polymer Surfaces with Polarized Laser Irradiation
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偏振激光照射聚合物表面的亚半微米周期性结构
DOI：
10.1143/jjap.32.6182
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发表时间：
1993
影响因子：
1.5
通讯作者：
H. Hiraoka
中科院分区：
文献类型：
--
作者：
M. Sendova;H. Hiraoka
用Nd：YAG四次谐波激光辐照聚酰亚胺薄膜、聚对苯二甲酸乙二酯薄膜、聚酰亚胺旋涂薄膜等，获得了四分之一微米间距和宽度的线性周期结构和点阵图像。我们的固态Nd：YAG激光源与准分子激光照射不同，因为它提供偏振光束而无需偏振器。原子力显微镜（AFM）和扫描电子显微镜（SEM）的研究已经进行。X射线光电子能谱（XPS）的研究表明，没有显着的化学反应发生在暴露区域。
A quarter-micron space-and-width linear periodic structures and an array of dot images are obtained with the Nd:YAG 4th harmonic laser irradiation on Kapton polyimide films, poly(ethylene terephthalate) films, spin-coated polyimide films and others. Our solid state Nd:YAG laser source is different from the excimer laser irradiation, in that it provides polarized beams without the need for a polarizer. Atomic force microscope (AFM) and scanning electron microscope (SEM) studies have been carried out. X-ray photoelectron spectroscopy (XPS) studies of laser-exposed areas indicate that no significant chemical reactions took place on exposed areas.