RF Plasmas in Methane: Prediction of Plasma Properties and Neutral Radical Densities with Combined Gas-Phase Physics and Chemistry Model
RF Plasmas in Methane: Prediction of Plasma Properties and Neutral Radical Densities with Combined Gas-Phase Physics and Chemistry Model
复制标题
甲烷中的射频等离子体：利用气相物理和化学组合模型预测等离子体性质和中性自由基密度
DOI：
10.1143/jjap.34.261
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发表时间：
1995
影响因子：
1.5
通讯作者：
G. Turban
中科院分区：
文献类型：
--
作者：
E. Gogolides;D. Mary;A. Rhallabi;G. Turban
一个综合等离子体物理和化学模拟器，并应用于射频甲烷放电在100毫托的压力范围。该模拟器由带电粒子物理的自洽流体模型，电子能量分布函数（EEDF）的直流场计算的公共域玻尔兹曼方程求解器，和一个广义的一维气相化学模型。甲烷放电表现出类似于稀有气体的正电性和电容性行为，负离子密度比电子小一个数量级。电子密度和能量与探针测量的文献值相比毫不逊色。甲烷中EEDF的高能量尾部具有比Druyvensteyn或麦克斯韦分布更少的电子。该化学模型适用于四个物种，即，CH 4，CH 3，CH 2，和H，和密度预测分别为1015，1012，1010，1013原子/cm 3的顺序，在140 mTorr。它们的密度分布与文献实验数据相比较有利。对每个反应的贡献的详细分析和敏感性分析揭示了每个化学物种的主要产生和损失途径。
A combined plasma physics and chemistry simulator is presented and applied for rf methane discharge in the 100 mTorr pressure range. The simulator consists of a self-consistent fluid model for charged species physics, a public-domain Boltzmann equation solver for dc field calculation of the electron energy distribution function (EEDF), and a generalized one-dimensional gas-phase chemistry model. The methane discharge shows an electropositive and capacitive behavior analogous to that of noble gases, with negative ion densities one order of magnitude less than those of electrons. Electron densities and energies compare favorably with literature values of probe measurements. The high-energy tail of the EEDF in methane has fewer electrons than the Druyvensteyn or Maxwell distribution. The chemistry model was applied for four species, namely, CH4, CH3, CH2, and H, and the densities predicted are on the order of 1015, 1012, 1010, 1013 atoms/cm3 respectively, at 140 mTorr. Their density profiles compare favorably with literature experimental data. Detailed analysis of the contribution of each reaction, and sensitivity analysis reveals the major creation and loss pathways for each chemical species.