Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption

Highly sensitive ZnO nanowire ethanol sensor with Pd adsorption
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DOI:
10.1063/1.2757605
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发表时间:
2007-07-30
影响因子:
4
通讯作者:
Chen, I.-Cherng
Chen, I.-Cherng
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
Hsueh, Ting-Jen;Chang, Shoou-Jinn;Chen, I.-Cherng

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作者报告了高密度单晶 ZnO 纳米线在图案化 ZnO:Ga/SiO2/Si 模板上的生长、纳米线表面上的 Pd 吸附以及基于 ZnO 纳米线的乙醇气体传感器的制造。通过 Pd 吸附,发现乙醇气体传感器的测量灵敏度在 170 摄氏度时从 18.5% 增加到 44.5%,在 230 摄氏度时从 36.0% 增加到 61.5%。 (c) 2007 年美国物理研究所。
The authors report the growth of high-density single crystalline ZnO nanowires on patterned ZnO:Ga/SiO2/Si templates, Pd adsorption on nanowire surfaces, and the fabrication of ZnO nanowire-based ethanol gas sensors. With Pd adsorption, it was found that measured sensitivities of the ethanol gas sensors increased from 18.5% to 44.5% at 170 degrees C and increased from 36.0% to 61.5% at 230 degrees C. (c) 2007 American Institute of Physics.