Higher-order vibrational mode frequency tuning utilizing fishbone-shaped microelectromechanical systems resonator
Higher-order vibrational mode frequency tuning utilizing fishbone-shaped microelectromechanical systems resonator
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DOI：
10.1088/0960-1317/23/4/045018
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发表时间：
2013-04
影响因子：
2.3
通讯作者：
Naoya Suzuki;H. Tanigawa;Kenichiro Suzuki
中科院分区：
文献类型：
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作者：
Naoya Suzuki;H. Tanigawa;Kenichiro Suzuki
基于微机电系统 (MEMS) 的谐振器因其在无线设备中的应用而受到广泛关注。该应用的要求包括小尺寸、高频、宽带宽和高便携性。然而，具有宽频率调谐的MEMS谐振器却鲜有报道。鱼骨形谐振器具有最大响应的谐振频率，该谐振频率可以根据多个激励电极的位置和数量而改变。因此，可以预期提供宽频率调谐。谐振器具有三种类型的静电力，可以产生使主梁变形。我们通过将模拟结果与测量结果进行比较来评估每个激励电极引起的振动模式。然后，我们使用我们在此提出的算法成功演示了第一至第五谐振模式的频率调谐。由此产生的频率调谐涵盖 178 至 1746 kHz。此外，我们还研究了抑制锚定损失以增强 Q 因子。实验表明，锥形锚固件比矩形锚固件提供更高的 Q 因子。还讨论了由悬梁支撑的谐振器的 Q 因子。由于悬挂梁会导致较高频率的复杂振动模式，因此这里无法获得高振动模式的 Q 因子的增强。目前，锥形锚谐振器被认为最适合频率调谐应用。
Resonators based on microelectromechanical systems (MEMS) have received considerable attention for their applications for wireless equipment. The requirements for this application include small size, high frequency, wide bandwidth and high portability. However, few MEMS resonators with wide-frequency tuning have been reported. A fishbone-shaped resonator has a resonant frequency with a maximum response that can be changed according to the location and number of several exciting electrodes. Therefore, it can be expected to provide wide-frequency tuning. The resonator has three types of electrostatic forces that can be generated to deform a main beam. We evaluate the vibrational modes caused by each exciting electrodes by comparing simulated results with measured ones. We then successfully demonstrate the frequency tuning of the first to fifth resonant modes by using the algorithm we propose here. The resulting frequency tuning covers 178 to 1746 kHz. In addition, we investigate the suppression of the anchor loss to enhance the Q-factor. An experiment shows that tapered-shaped anchors provide a higher Q-factor than rectangular-shaped anchors. The Q-factor of the resonators supported by suspension beams is also discussed. Because the suspension beams cause complicated vibrational modes for higher frequencies, the enhancement of the Q-factor for high vibrational modes cannot be obtained here. At present, the tapered-anchor resonators are thought to be most suitable for frequency tuning applications.