Shaped comb fingers for tailored electromechanical restoring force
Shaped comb fingers for tailored electromechanical restoring force
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DOI：
10.1109/jmems.2003.809948
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发表时间：
2003-06-01
影响因子：
2.7
通讯作者：
Allen, JJ
中科院分区：
文献类型：
--
作者：
Jensen, BD;Mutlu, S;Allen, JJ
静电梳齿驱动器广泛应用于微机电设备中。这些梳齿驱动器通常采用矩形指状物，当它们接合时，矩形指状物产生稳定的恒定力输出。本文探讨了使用的形状比其他常见的矩形手指。这种形状的梳齿允许针对各种应用定制的力-位移响应。为了简化异形梳齿的分析和设计，建立了一个简单的模型来预测异形梳齿所产生的力。这个模型是用数值模拟几个不同的样品形状的梳子设计进行测试。最后，该模型进行了进一步测试，并使用形状的梳齿被证明，通过设计，制造和测试的可调谐谐振器，允许向上和向下移动的谐振频率。仿真和测试结果表明了该模型的有效性和准确性。最后，成形梳齿的其他应用进行了描述，包括可调传感器，低压致动器，多稳态致动器，或线性电压位移行为的致动器。
Electrostatic comb drives are widely used in micro-electromechanical devices. These comb drives often employ rectangular fingers which produce a stable, constant force output as they engage. This paper explores the use of shapes other than the common rectangular fingers. Such shaped comb fingers allow customized force-displacement response for a variety of applications. In order to simplify analysis and design of shaped fingers, a simple model is developed to predict the force generated by shaped comb fingers. This model is tested using numerical simulation on several different sample shaped comb designs. Finally, the model is further tested, and the use of shaped comb fingers is demonstrated, through the design, fabrication, and testing of tunable resonators which allow both up and down shifts of the resonant frequency. The simulation and testing results demonstrate the usefulness and accuracy of the simple model. Finally, other applications for shaped comb fingers are described, including tunable sensors, low-voltage actuators, multistable actuators, or actuators with linear voltage-displacement behavior.