Near-field Raman spectral measurement of monocrystalline silicon by apertureless SNOM in feflection geometry

Near-field Raman spectral measurement of monocrystalline silicon by apertureless SNOM in feflection geometry
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DOI:
10.1117/12.571128
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发表时间:
2005-02
期刊:
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影响因子:
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通讯作者:
Xiaobin Wu;Yang Wang;Jia Wang;Qian Tian;Jianyuan Yu
Xiaobin Wu;Yang Wang;Jia Wang;Qian Tian;Jianyuan Yu
中科院分区:
其他
文献类型:
--
作者:
Xiaobin Wu;Yang Wang;Jia Wang;Qian Tian;Jianyuan Yu

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扫描近场光学显微镜(SNOM)与拉曼光谱技术相结合,可以提供超过衍射极限的纳米空间分辨率的光谱信息,具有广泛的应用前景,有助于理解纳米尺度下光与物质的相互作用。本文采用无孔径SNOM系统开发了近场拉曼光谱实验装置。Ar+激光(514nm)以一定角度聚焦到样品表面上。金属化针尖是原子力显微镜的Au层涂覆的悬臂梁,并且在接触模式下工作。当探针靠近样品表面时,可以检测到近场拉曼光谱信号。此外,无光阑近场光学显微镜似乎比光阑式近场光学显微镜系统具有更大的潜在分辨率。此外,本实验中采用的反射几何形状不需要特定的样品制备,使得近场光谱研究成为任何样品的现实。反射的近场拉曼光谱信号由显微镜物镜收集。最后给出了单晶硅的近场拉曼谱。
The combination of scanning near field optical microscopy (SNOM) and Raman spectroscopy provides specific spectra information with nanometer spatial resolution beyond the diffraction limit, which has a wide range of potential applications and can help to understand the interactions between light and matter in nanometer scale. In this paper, a near-field Raman spectroscopy experimental setup has been developed by using an apertureless SNOM system. An Ar+ laser (514nm ) is focused at an angle onto the sample surface. The metallized tip is an Au-layer-coated cantilever of an atomic force microscopy and working in the contact mode. The near field Raman spectra signal can be detected when the tip approached the sample surface. In addition, the apertureless SNOM appears to have greater potential resolution than aperture-type SNOM system. Furthermore, the reflection geometry employed in this experiment allows no need for specific sample preparation, making near field spectrum study a reality for any samples. The reflected near field Raman spectra signal is collected by a microscope objective. Finally, the near field Raman spectra of monocrystalline silicon are presented.